CMNF (Clean Room Guidelines)

Center for micro and nano fabrication (CMNF) at CRF is being developed to house several high-end sensitive systems used for micro & nano fabrication and characterization. The facility will probably be fully functional around Sept, 2021. The facility will have Clean Class Laboratories of various categories as specified below.

CLEAN ROOM SPECIFICATIONS
  • Total proposed built-up Clean Lab area is 1750 SqFt.
  • Class 100 area of 540 Sq Ft,
  • Class 1000 area of 460 Sq Ft,
  • Class 10000 area of 345 Sq Ft and
  • Class 100000 area of 405 Sq Ft is planned.
  • Required Temperature with Stability: 22±1 Degree C
  • Humidity:  45±5 Rh

 

Planned activities at CMNF: Current research and development efforts at the newly established CMNF would primarily be in the following major themes, besides other areas of Institutional research

 

General Rules for Working in Clean Labs

  • Staff/users entry in the Clean Room through biometric access only.  New members will be given access to enter clean labs only after getting proper training and having worked in the Clean Room labs for minimum two weeks.
  • Proper gowning is required to enter clean labs. No one is allowed to enter inside the clean room with woolens, track suit, caps, socks etc. All members should hang their gowns properly before leaving the lab.
  • Outside items like Book, register, laptop, eatables  etc.. are NOT allowed inside the Clean Room. Only papers/pads kept inside can be used for making notes. Also, taking out any item outside the clean labs not allowed. However, technical staff/service engineer of vendors are permitted to take any defective items with proper norms and recording.   Use of PEN DRIVES and USED CD/DVD to copy data from the computer is strictly prohibited, Only fresh CD/DVD can be used for this purpose.
  • Samples and other items can be brought inside only through PASS BOX
  • Avoid moving in and out the lab frequently, and speaking loudly inside clean labs.
  • Enter details of experiments done in the LOG BOOK before leaving the lab.
  • User must report within 15 min of alloted slot time or slot will be cancelled and user will be charged for full slot.
  • Kindly cooperate with CRF/CMNF staff and get their assistance by contacting them at  number displayed at reception for any emergency or assistance.

Facilities

S.No.
Description
1.
Maskless Lithography (Indenter – Dr. Rakesh Kumar)
2.
Optical Microscope (Indenter-Dr. K.C. Jena)
3.
Diffusion and Oxidation Furnace (Indenter-Dr. Rakesh Kumar
4.
RF & DC sputtering (Indenter-Dr.Mukesh Kumar)
5.
E beam evaporation (Dr. Prabhat Agnihotri)
6.
LPCVD (Indenter-Dr. Prabhat or Ravi Mohan Prasad)
7.
Wet bench (Dr. Rakesh Kumar)
8.
Thermal evaporation (Dr. Prabhat Agnihotri)
9.
Spin Coater (Dr. Rohit Sharma)
10.
IV- CV characteristics along with probe station (Dr. Rohit Sharma)