JSM-7610F FESEM is an ultra high resolution Schottky Field Emission Scanning Electron Microscope which has semi-in-lens objective lens. High power optics can provide high throughput and high performance analysis and achieving even better resolution (15 kV 0.8 nm, 1 kV 1.0nm). JSM-7610FPlus can be equipped to satisfy a variety of user needs, including observation at low accelerating voltages with GENTLEBEAM™ mode, and signal selection using r-filter. The next-generation r-filter in this model is a unique energy filter that combines a secondary electron control electrode, a backscattered electron control electrode and a filter electrode.
When the specimen surface is irradiated by the electron beam, electron with various energies are emitted from the surface. The new r-filter makes it possible to selectively detect the secondary electrons and backscattered electrons from the specimen while the electron beam is held at the center of the lens using a combination of multiple electrostatic fields with increase in signal. It is suitable for high spatial resolution analysis, and with its gentle Beam mode feature, it can reduce the incident electron penetration to the specimen, enabling to observe its topmost surface by using a few hundred landing energy. Combining two proven technologies – an electron column with semi-in-lens objective lens which can provide high resolution imaging by low accelerating voltage and an in-lens Schottky FEG which can provide stable large probe current – to deliver ultrahigh resolution with wide range of probe currents for all applications (A few pA to more than 200 nA). The in-lens Schottky FEG is a combination of a Schottky FEG and the first condenser lens and is designed to collect the electrons from the emitter efficiently.
Usage:
Surface Morphology
Microstructure
Phase analysis
Elemental composition
Elemental mapping
3-D imaging using BSE
Cross-sectional imaging for thickness of thin films or interfacial study